闂�(gu膩n)閸佃锛�缇庡湅(gu贸)鍝堝笇缇呴偊濞�璩藉鍒╂柉
T9绯诲垪闆欏厜鏉熺传澶栧彲瑕�(ji脿n)鍒嗗厜鍏夊害瑷�(j矛)
鐢�(ch菐n)鍝佷粙绱�
T9绯诲垪闆欏厜鏉熺传澶栧彲瑕�(ji脿n)鍒嗗厜鍏夊害瑷�(j矛)鏈€鏂版帹鍑虹殑涓€娆鹃珮绔传澶栧彲瑕�(ji脿n)鍒嗗厜鍏夊害瑷�(j矛)鐢�(ch菐n)鍝�锛�锛岃┎鍎€鍣ㄩ厤鏈夌壒鍒跺厜鏌�銆佽秴浣庡櫔鑱蹭俊铏�(h脿o)妾㈡脯(c猫)绯荤当(t菕ng)锛涗繚璀変簡0.0001% 鐨勮秴浣庨洔鏁e厜銆傚厜搴﹁寖鍦嶅閬�(d谩)-6Abs~6Abs銆傚厖鍒嗘豢(m菐n)瓒抽珮鍚稿厜搴︽ǎ鍝佺殑娓�(c猫)瑭﹂渶姹�銆傚唬娉涙噳(y墨ng)鐢ㄤ簬鏁欏(xu茅)鐮旂┒銆佽(w猫i)鐢熼槻鐤€佺挵(hu谩n)澧冪洠(ji膩n)娓�(c猫)銆佽静(n贸ng)鏋楃墽婕佹キ(y猫)銆佸埗閫犳キ(y猫)銆佽▓(j矛)閲忔牎婧�(zh菙n)銆佽鏀挎(j墨)闂�(gu膩n)銆佸競鏀裤€佺鐮旀(j墨)妲�(g貌u)銆佸嫎瀵熸按鍒╃瓑闋�(l菒ng)鍩�锛屾槸鍚勯牁(l菒ng)鍩熺瀛�(xu茅)瀹剁爺绌舵帰绱㈠張涓€绉戠爺鍒╁櫒锛�
鐢�(ch菐n)鍝侀厤缃細
閵�(xi膩o)鍞欢铏�(h脿o) | 鍨嬭櫉(h脿o) | 鍚嶇ū(ch膿ng) | 瑾�(shu艒)鏄� |
T9 | T9 | 闆欏厜鏉熺传澶栧彲瑕�(ji脿n)鍒嗗厜鍏夊害瑷�(j矛) | 鍥哄畾2nm鍏夎瓬甯跺 |
T9S | T9S | 闆欏厜鏉熺传澶栧彲瑕�(ji脿n)鍒嗗厜鍏夊害瑷�(j矛) | 6妾斿彲璁婂厜璀滃付瀵� |
T9CS | T9CS | 闆欏厜鏉熺传澶栧彲瑕�(ji脿n)鍒嗗厜鍏夊害瑷�(j矛) | 0.1nm~5nm閫g簩(x霉)鍙畩鍏夎瓬甯跺 |
鍙伕闄勪欢锛�
閵�(xi膩o)鍞欢铏�(h脿o) | 闄勪欢鍨嬭櫉(h脿o) | 闄勪欢鍚嶇ū(ch膿ng) | 閬╃敤鐢�(ch菐n)鍝� |
DDA-1 | DDA-1 | DDA-1闆欏厜鏉熸憾鍑哄害闄勪欢 | T9/T9S/T9CS |
DPS-1 | DPS-1 | DPS-1闆欓€氶亾锠曞嫊(d貌ng)娉甸檮浠� | T9/T9S/T9CS |
DSR-1 | DSR-1 | DSR-1闆欏厜鏉熺浉灏�(du矛)閺¢潰鍙嶅皠闄勪欢1 | T9/T9S/T9CS |
DTC5-1 | DTC5-1 | DTC5-1闆欏厜鏉熶簲鑱�(li谩n)鎭掓韩姹犻檮浠� | T9/T9S/T9CS |
DTC-1 | DTC-1 | DTC-1闆欏厜鏉熸亽婧ǎ鍝佹睜闄勪欢 | T9/T9S/T9CS |
DC8-1 | DC8-1 | DC8-1闆欏厜鏉熷叓鑱�(li谩n)姹犻檮浠� | T9/T9S/T9CS |
DLC55-1 | DLC55-1 | DLC55-1闆欏厜鏉熶簲鑱�(li谩n)50mm闀�(zh菐ng)妯e搧姹犻檮浠� | T9/T9S/T9CS |
DLC10-1 | DLC10-1 | DLC10-1闆欏厜鏉�100mm闀�(zh菐ng)妯e搧姹犳灦闄勪欢 | T9/T9S/T9CS |
DAC-1 | DAC-1 | DAC-1闆欏厜鏉熷彲璁婅搴︽ǎ鍝佽嚭(t谩i)闄勪欢 | T9/T9S/T9CS |
DIS60-1 | DIS60-1 | 闆欏厜鏉�60mm绌嶅垎鐞冮檮浠� | T9S/T9CS |
DIS150-1 | DIS150-1 | 闆欏厜鏉�150mm绌嶅垎鐞冮檮浠� | T9S/T9CS |
鍎€鍣ㄧ壒榛�(di菐n)
路 瓒呬綆闆滄暎鍏夆€斺€斿厜搴﹁寖鍦嶅閬�(d谩)-6Abs~6Abs
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路 瀵尝闀�(zh菐ng)鑼冨湇鈥斺€斿(sh铆)鐝�(xi脿n)娣辩传澶栧崁(q奴)娓�(c猫)閲�
鍎€鍣ㄧ传澶栧厜婧愰伕鐢ㄩ珮鎬ц兘姘樼噲锛屾娓�(c猫)鍣ㄩ伕鐢ㄧ传澶栧寮�(qi谩ng)楂橀潏鏁忓害鍏夐浕鍊嶅绠�锛屽(sh铆)鐝�(xi脿n)185nm~900nm鐨勫娉㈤暦(zh菐ng)鑼冨湇锛屽湪姘�?d煤)鐛ゾ閭(sh铆)鍙(sh铆)鐝�(xi脿n)185nm浠ヤ笅娣辩传澶栨脯(c猫)閲�銆�
路 鑷嫊(d貌ng)鍏夎瓬甯跺鎺冩弿鈥斺€旀脯(c猫)閲忔暩(sh霉)鎿�(j霉)鏇村姞婧�(zh菙n)纰�
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路 闁�(k膩i)鏀惧紡鍎€鍣ㄦ噳(y墨ng)鐢ㄥ钩鑷�(t谩i)鈥斺€旀柟渚跨敤鎴�(h霉)浜屾闁�(k膩i)鐧�(f膩)
鍎€鍣ㄩ噰鐢ㄦā濉婂寲瑷�(sh猫)瑷�(j矛)锛屾彁渚涢枊(k膩i)鏀惧紡鍏夊(xu茅)骞宠嚭(t谩i)鍙婇浕鍣ㄦ帴鍙�锛屾柟渚跨鐮斾汉鍝℃牴鎿�(j霉)宸ヤ綔闇€瑕侀€�(j矛n)琛屼簩娆¢枊(k膩i)鐧�(f膩)銆�
路 鍏�(n猫i)缃笁绋厜婧愨€斺€旀柟渚跨敤鎴�(h霉)閫�(j矛n)琛屾尝闀�(zh菐ng)鏍℃簴(zh菙n)
鍎€鍣ㄩ櫎浜嗘彁渚涢珮鎬ц兘姘樼噲銆侀暦(zh菐ng)澹藉懡閹㈢噲鍏╃ó宸ヤ綔鍏夋簮澶�锛岄倓鍏�(n猫i)缃簡娉㈤暦(zh菐ng)鏍℃簴(zh菙n)鍏夋簮锛屾柟渚跨敤鎴�(h霉)鍦ㄩ渶瑕佹檪(sh铆)閫�(j矛n)琛屾尝闀�(zh菐ng)鏍℃簴(zh菙n)锛屼繚璀夋脯(c猫)閲忔暩(sh霉)鎿�(j霉)鐨勬簴(zh菙n)纰哄彲闈�銆�
路 楂樻晥绌烘埃闃婚殧鍏夊(xu茅)绯荤当(t菕ng)鈥斺€斿厖鍒嗕繚闅滃剙鍣ㄤ娇鐢ㄥ=鍛�
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鎬ц兘鎸囨(bi膩o)
鎸囨(bi膩o)鍚嶇ū(ch膿ng) | T9CS | T9S | T9 | |||
娉㈤暦(zh菐ng)鑼冨湇 | 185nm锝�900nm | 185nm锝�900nm | 185nm锝�900nm | |||
娉㈤暦(zh菐ng)绀哄€艰宸� | 卤0.2nm | 卤0.2nm | 卤0.2nm | |||
婕傜Щ | 鈮�0.1锛�/h | 鈮�0.1锛�/h | 鈮�0.1锛�/h | |||
鍏夎瓬甯跺 | 0.1nm锝�5.0nm锛堜互0.1nm鐐洪枔闅旈€g簩(x霉)鍙(di脿o)锛� | 0.1nm銆�0.2nm銆�0.5nm銆�1.0nm銆�2.0nm銆�5.0nm | 2.0nm | |||
閫忓皠姣旂ず鍊艰宸� | 卤0.002 Abs锛�0锝�0.5Abs锛� | 卤0.002 Abs锛�0锝�0.5Abs锛� | 卤0.002 Abs锛�0锝�0.5Abs锛� | |||
卤0.004 Abs锛�0.5Abs锝�1Abs锛� | 卤0.004 Abs锛�0.5Abs锝�1Abs锛� | 卤0.004 Abs锛�0.5Abs锝�1Abs锛� | ||||
卤0.3% | 卤0.3% | 卤0.3% | ||||
閫忓皠姣旈噸寰�(f霉)鎬� | 鈮�0.001 Abs锛�0锝�0.5Abs锛� | 鈮�0.001 Abs锛�0锝�0.5Abs锛� | 鈮�0.001 AbS锛�0锝�0.5Abs锛� | |||
鈮�0.002 Abs锛�0.5Abs锝�1Abs锛� | 鈮�0.002 Abs锛�0.5Abs锝�1Abs锛� | 鈮�0.002 Abs锛�0.5Abs锝�1Abs锛� | ||||
鈮�0.1% | 鈮�0.1% | 鈮�0.1% | ||||
鍩虹窔骞崇洿搴︼紙鍚稿厜搴︼級 | 卤0.0008 | 卤0.0008 | 卤0.0008 | |||
闆滄暎鍏� | 220nm | 360nm | 220nm | 360nm | 220nm | 360nm |
鈮�0.0001% | 鈮�0.0001% | 鈮�0.0001% | 鈮�0.0001% | 鈮�0.0001% | 鈮�0.0001% | |
鍏夊(xu茅)绯荤当(t菕ng) | 娣峰悎C-T闆欏柈鑹插櫒绯荤当(t菕ng) | 娣峰悎C-T闆欏柈鑹插櫒绯荤当(t菕ng) | 娣峰悎C-T闆欏柈鑹插櫒绯荤当(t菕ng) | |||
鍏夋簮 | 鍏�(n猫i)缃皹鐕�銆侀帰鐕堛€佹睘鐕�锛岃嚜鍕�(d貌ng)鍒囨彌 | 鍏�(n猫i)缃皹鐕堛€侀帰鐕�銆佹睘鐕�锛岃嚜鍕�(d貌ng)鍒囨彌 | 鍏�(n猫i)缃皹鐕�銆侀帰鐕�銆佹睘鐕�锛岃嚜鍕�(d貌ng)鍒囨彌 | |||
澶栧舰灏哄 | 913mm脳645mm脳298mm | 913mm脳645mm脳298mm | 913mm脳645mm脳298mm | |||
閲嶉噺 | 62kg | 62kg | 62kg |